Study of XUV beam splitter flatness for use on a Michelson interferometer

Anne-Sophie Morlens (1, 2) , Philippe Zeitoun (1, 2) , Laurent Vanbostal (1, 2) , Pascal Mercère (1, 2) , Grégory Faivre (1, 2) , Sébastien Hubert (1, 2) , Philippe Troussel (3) , Christian Remond (3) , Rémy Marmoret (3) , Franck Delmotte (4) , Marie-Françoise Ravet (4) , Marc Rouillay (4)

1 LIXAM - Laboratoire d'interaction du rayonnement X avec la matière
2 LOA - Laboratoire d'optique appliquée
3 DAM/DIF - DAM Île-de-France
4 Laboratoire Charles Fabry de l'Institut d'Optique / Scop

A XUV Michelson interferometer has been developed by LIXAM/CEA/LCFIO and has been tested as a Fourier-transform spectrometer for measurement of X-ray laser line shape. The observed strong deformation of the interference fringes limited the interest of such an interferometer for plasma probing. Because the fringe deformation was coming from a distortion of the beam splitter (5 × 5 mm^2 open aperture, about 150 nm thick), several parameters of the multilayer deposition used for the beam splitter fabrication have been recently optimized. The flatness has been improved from 80 nm rms obtained by using the ion beam sputtering technique, to 20 nm rms by using the magnetron sputtering technique. Over 3 × 3 mm^2, the beam splitter has a flatness better than 4 nm rms.

Keywords: Fourier-transform spectroscopy; XUV beam splitter; XUV Michelson interferometry

Domains: Physics [physics]; Physics [physics]; Optics [physics.optics]

Anne-Sophie Morlens, Philippe Zeitoun, Laurent Vanbostal, Pascal Mercère, Grégory Faivre, et al.. Study of XUV beam splitter flatness for use on a Michelson interferometer. Laser and Particle Beams, 2004, 22 (3), pp.279-284. ⟨10.1017/S0263034604223114⟩. ⟨hal-00522774⟩