Skip to Main content Skip to Navigation
New interface
Journal articles

Study of XUV beam splitter flatness for use on a Michelson interferometer

Abstract : A XUV Michelson interferometer has been developed by LIXAM/CEA/LCFIO and has been tested as a Fourier-transform spectrometer for measurement of X-ray laser line shape. The observed strong deformation of the interference fringes limited the interest of such an interferometer for plasma probing. Because the fringe deformation was coming from a distortion of the beam splitter (5 × 5 mm^2 open aperture, about 150 nm thick), several parameters of the multilayer deposition used for the beam splitter fabrication have been recently optimized. The flatness has been improved from 80 nm rms obtained by using the ion beam sputtering technique, to 20 nm rms by using the magnetron sputtering technique. Over 3 × 3 mm^2, the beam splitter has a flatness better than 4 nm rms.
Document type :
Journal articles
Complete list of metadata
Contributor : Thuy Le Connect in order to contact the contributor
Submitted on : Friday, October 1, 2010 - 4:37:13 PM
Last modification on : Tuesday, October 18, 2022 - 3:37:42 AM

Links full text



Anne-Sophie Morlens, Philippe Zeitoun, Laurent Vanbostal, Pascal Mercère, Grégory Faivre, et al.. Study of XUV beam splitter flatness for use on a Michelson interferometer. Laser and Particle Beams, 2004, 22 (3), pp.279-284. ⟨10.1017/S0263034604223114⟩. ⟨hal-00522774⟩



Record views