Synthesis of conducting transparent few-layer graphene directly on glass at 450 °C

Chang Seok Lee (1) , Costel Sorin Cojocaru (1) , Waleed Moujahid (1, 2) , Bérengère Lebental (1, 2) , Marc Chaigneau (1) , Marc Châtelet (1) , François Le Normand (1, 3) , Jean-Luc Maurice (1)

1 LPICM - Laboratoire de physique des interfaces et des couches minces [Palaiseau]
2 IFSTTAR/MACS - Département Mesure, Auscultation et Calcul Scientifique
3 InESS - Institut d'Electronique du Solide et des Systèmes

Post-growth transfer and high growth temperature are two major hurdles that research has to overcome to get graphene out of research laboratories. Here, using a plasma-enhanced chemical vapour deposition process, we demonstrate the large-area formation of continuous transparent graphene layers at temperatures as low as 450 °C. Our few-layer graphene grows at the interface between a pre-deposited 200 nm Ni catalytic film and an insulating glass substrate. After nickel etching, we are able to measure the optical transmittance of the layers without any transfer. We also measure their sheet resistance directly and after inkjet printing of electrical contacts: sheet resistance is locally as low as 500 Ω sq-1. Finally the samples equipped with printed contacts appear to be efficient humidity sensors.

Domaines: Science des matériaux [cond-mat.mtrl-sci]; Matériaux

Chang Seok Lee, Costel Sorin Cojocaru, Waleed Moujahid, Bérengère Lebental, Marc Chaigneau, et al.. Synthesis of conducting transparent few-layer graphene directly on glass at 450 °C. Nanotechnology, 2012, 23, pp.5603. ⟨10.1088/0957-4484/23/26/265603⟩. ⟨hal-00753309⟩