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Article Dans Une Revue Thin Solid Films Année : 2011

Generalized ellipsometry of artificially designed line width roughness

Thomas A. Germer
  • Fonction : Auteur
Brent C. Bergner
  • Fonction : Auteur
Ronald G. Dixson
  • Fonction : Auteur

Résumé

We use azimuthally resolved spectroscopic Mueller matrix ellipsometry to study a periodic silicon line structure with and without artificially-generated line width roughness (LWR). We model the artificially perturbed grating using one- and two-dimensional rigorous coupled-wave methods in order to evaluate the sensitivity of the experimental spectrally resolved data, measured using a generalized ellipsometer, to the dimensional parameters of LWR. The sensitivity is investigated in the context of multiple conical mounting (azimuth angle) configurations, providing more information about the grating profile.

Dates et versions

hal-00757371 , version 1 (26-11-2012)

Identifiants

Citer

Martin Foldyna, Thomas A. Germer, Brent C. Bergner, Ronald G. Dixson. Generalized ellipsometry of artificially designed line width roughness. Thin Solid Films, 2011, 519, pp.2633-2636. ⟨10.1016/J.TSF.2010.11.085⟩. ⟨hal-00757371⟩
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