Abstract : We use azimuthally resolved spectroscopic Mueller matrix ellipsometry to study a periodic silicon line structure with and without artificially-generated line width roughness (LWR). We model the artificially perturbed grating using one- and two-dimensional rigorous coupled-wave methods in order to evaluate the sensitivity of the experimental spectrally resolved data, measured using a generalized ellipsometer, to the dimensional parameters of LWR. The sensitivity is investigated in the context of multiple conical mounting (azimuth angle) configurations, providing more information about the grating profile.
https://hal-polytechnique.archives-ouvertes.fr/hal-00757371
Contributor : Martin Foldyna
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Submitted on : Monday, November 26, 2012 - 5:02:07 PM
Last modification on : Wednesday, March 27, 2019 - 4:20:04 PM
Martin Foldyna, Thomas A. Germer, Brent C. Bergner, Ronald G. Dixson. Generalized ellipsometry of artificially designed line width roughness. Thin Solid Films, Elsevier, 2011, 519, pp.2633-2636. ⟨10.1016/J.TSF.2010.11.085⟩. ⟨hal-00757371⟩
