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Theory and experiment of large numerical aperture objective Raman microscopy: application to the stress-tensor determination in strained cubic materials
Abstract : We present the theory underlying the large numerical aperture objective micro-Raman backscattering experiment and apply it to the elaboration of a characterization methodology for the determination of the stress tensor in strained cubic semiconductor structures. The presented stress characterization technique consists in monitoring the variations of the stress-sensitive optical phonon peak position and linewidth while rotating stepwise the sample about its normal. The practical application of the technique is illustrated on a silicon-on-insulator (SOI) microelectronic structure demonstrating a plane stress-tensor determination.
https://hal-polytechnique.archives-ouvertes.fr/hal-00838065
Contributor : Gennaro Picardi Connect in order to contact the contributor
Submitted on : Monday, June 24, 2013 - 4:28:14 PM
Last modification on : Friday, May 28, 2021 - 1:58:04 PM
Contributor : Gennaro Picardi Connect in order to contact the contributor
Submitted on : Monday, June 24, 2013 - 4:28:14 PM
Last modification on : Friday, May 28, 2021 - 1:58:04 PM
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