Generation and observation of CHF2, CF2, and CF 3 in a CF4/He microwave discharge system: A mass spectrometric method

Michel Sablier (1) , K. Iwase (2) , G. Sato (3) , T. Fujii (2, 4)

1 DCMR - Laboratoire des mécanismes réactionnels
2 NIES - National Institute for Environmental Studies
3 Tokyo University of Science [Tokyo]
4 Department of Chemistry

The neutral active products extracted from a microwave discharge in CF 4/He were analyzed by mass spectrometry. Free radical species such as CHF2, CF2, and CF3 were detected and analyzed for the first time using the Li+ ion attachment mass spectrometry technique. We examined the effects of varying the MW power and the feed gas composition on the production of an intense flow source of CHF2, CF2, and CF3 radicals as well as many other products. A radical chain reaction is postulated as the mechanism for the formation of the observed polymeric products. © 2005 Elsevier B.V. All rights reserved.

Michel Sablier, K. Iwase, G. Sato, T. Fujii. Generation and observation of CHF2, CF2, and CF 3 in a CF4/He microwave discharge system: A mass spectrometric method. Chemical Physics Letters, 2005, 4-6, pp.342-348. ⟨10.1016/j.cplett.2005.04.112⟩. ⟨hal-00904631⟩