Structural properties of relaxed thin film germanium layers grown by low temperature RF-PECVD epitaxy on Si and Ge (100) substrates

Romain Cariou 1, 2 Rosa Ruggeri 3 Xi Tan 1 Giovanni Mannino 3 Joaquim Nassar 1 Pere Roca I Cabarrocas 1
1 LPICM - Laboratoire de physique des interfaces et des couches minces [Palaiseau]
2 III-V Lab - Alcatel-Thalès III-V lab
3 IMM - Institute for Microelectronics and Microsystems/ Istituto per la Microelettronica e Microsistemi
Abstract : We report on unusual low temperature (175 °C) heteroepitaxial growth of germanium thin films using a standard radio-frequency plasma process. Spectroscopic ellipsometry and transmission electron microscopy (TEM) reveal a perfect crystalline quality of epitaxial germanium layers on (100) c-Ge wafers. In addition direct germanium crystal growth is achieved on (100) c-Si, despite 4.2% lattice mismatch. Defects rising from Ge/Si interface are mostly located within the first tens of nanometers, and threading dislocation density (TDD) values as low as 106 cm−2 are obtained. Misfit stress is released fast: residual strain of −0.4% is calculated from Moiré pattern analysis. Moreover we demonstrate a striking feature of low temperature plasma epitaxy, namely the fact that crystalline quality improves with thickness without epitaxy breakdown, as shown by TEM and depth profiling of surface TDD.
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AIP Advances, American Institute of Physics- AIP Publishing LLC, 2014, pp.077103. 〈10.1063/1.4886774〉
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Romain Cariou, Rosa Ruggeri, Xi Tan, Giovanni Mannino, Joaquim Nassar, et al.. Structural properties of relaxed thin film germanium layers grown by low temperature RF-PECVD epitaxy on Si and Ge (100) substrates. AIP Advances, American Institute of Physics- AIP Publishing LLC, 2014, pp.077103. 〈10.1063/1.4886774〉. 〈hal-01019905〉

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