Aomar Hadjadj, Fadila Larbi, Mickaël Gilliot, Pere Roca I Cabarrocas. Etching of a-Si:H thin films by hydrogen plasma: A view from in situ spectroscopic ellipsometry.
Journal of Chemical Physics, American Institute of Physics, 2014, 141 (8),
⟨10.1063/1.4893558⟩.
⟨hal-01230706⟩