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Understanding the amorphous-to-microcrystalline silicon transition in SiF4/H2/Ar gas mixtures

Jean-Christophe Dornstetter 1 Bastien Bruneau 1 Pavel Bulkin Erik V. Johnson 2 Pere Roca I Cabarrocas 1 
1 LPICM - Laboratoire de physique des interfaces et des couches minces [Palaiseau]
2 UL2 - Université Lumière - Lyon 2
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https://hal-polytechnique.archives-ouvertes.fr/hal-01230708
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Submitted on : Wednesday, November 18, 2015 - 7:52:01 PM
Last modification on : Thursday, October 21, 2021 - 5:24:21 AM

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Jean-Christophe Dornstetter, Bastien Bruneau, Pavel Bulkin, Erik V. Johnson, Pere Roca I Cabarrocas. Understanding the amorphous-to-microcrystalline silicon transition in SiF4/H2/Ar gas mixtures. Journal of Chemical Physics, 2014, 140 (23), ⟨10.1063/1.4883503⟩. ⟨hal-01230708⟩

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