Jean-Christophe Dornstetter, Bastien Bruneau, Pavel Bulkin, Erik V. Johnson, Pere Roca I Cabarrocas. Understanding the amorphous-to-microcrystalline silicon transition in SiF4/H2/Ar gas mixtures.
Journal of Chemical Physics, American Institute of Physics, 2014, 140 (23),
⟨10.1063/1.4883503⟩.
⟨hal-01230708⟩