Understanding the amorphous-to-microcrystalline silicon transition in SiF4/H2/Ar gas mixtures

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https://hal-polytechnique.archives-ouvertes.fr/hal-01230708
Contributor : Pere Roca I Cabarrocas <>
Submitted on : Wednesday, November 18, 2015 - 7:52:01 PM
Last modification on : Wednesday, April 3, 2019 - 1:08:00 AM

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Jean-Christophe Dornstetter, Bastien Bruneau, Pavel Bulkin, Erik V. Johnson, Pere Roca I Cabarrocas. Understanding the amorphous-to-microcrystalline silicon transition in SiF4/H2/Ar gas mixtures. Journal of Chemical Physics, American Institute of Physics, 2014, 140 (23), ⟨10.1063/1.4883503⟩. ⟨hal-01230708⟩

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