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Journal Articles Journal of Chemical Physics Year : 2014

Understanding the amorphous-to-microcrystalline silicon transition in SiF4/H2/Ar gas mixtures

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Physics [physics] Engineering Sciences [physics]

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https://hal-polytechnique.archives-ouvertes.fr/hal-01230708

Submitted on : Wednesday, November 18, 2015-7:52:01 PM

Last modification on : Friday, March 24, 2023-2:53:01 PM

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hal-01230708 , version 1 (18-11-2015)

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Jean-Christophe Dornstetter, Bastien Bruneau, Pavel Bulkin, Erik V. Johnson, Pere Roca I Cabarrocas. Understanding the amorphous-to-microcrystalline silicon transition in SiF4/H2/Ar gas mixtures. Journal of Chemical Physics, 2014, 140 (23), ⟨10.1063/1.4883503⟩. ⟨hal-01230708⟩

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