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Understanding the amorphous-to-microcrystalline silicon transition in SiF4/H2/Ar gas mixtures
Jean-Christophe Dornstetter
1
Bastien Bruneau
2
Pavel Bulkin
Erik V. Johnson
3
Pere Roca I Cabarrocas
1
Jean-Christophe Dornstetter 1
Author
Bastien Bruneau 2
Author
Pavel Bulkin
Author IdHAL : pavel-bulkin ResearcherId : http://www.researcherid.com/rid/W-6710-2019 ORCID : https://orcid.org/0000-0001-5591-3470
Erik V. Johnson 3
Author IdHAL : erikvjohnson ORCID : https://orcid.org/0000-0003-0920-2111
Pere Roca I Cabarrocas 1
Author
1
LPICM - Laboratoire de physique des interfaces et des couches minces [Palaiseau] (bat. 408 Route de Saclay 91128 PALAISEAU CEDEX - France)
- X - École polytechnique (École polytechnique, 91128 Palaiseau Cedex - France)
- CNRS - Centre National de la Recherche Scientifique : UMR7647 (France)
3
UL2 - Université Lumière - Lyon 2 (86, rue Pasteur - 69007 Lyon - France)
Document type :
Journal articles
Complete list of metadatas
https://hal-polytechnique.archives-ouvertes.fr/hal-01230708
Contributor : Pere Roca I Cabarrocas <>
Submitted on : Wednesday, November 18, 2015 - 7:52:01 PM
Last modification on : Thursday, December 10, 2020 - 5:08:03 PM
Contributor : Pere Roca I Cabarrocas <>
Submitted on : Wednesday, November 18, 2015 - 7:52:01 PM
Last modification on : Thursday, December 10, 2020 - 5:08:03 PM
Identifiers
- HAL Id : hal-01230708, version 1
- DOI : 10.1063/1.4883503
Collections
X | CNRS | INRA | X-PICM | LPICM | X-DEP-PHYS | UNIV-LYON2 | UDL | INRAE
Citation
Jean-Christophe Dornstetter, Bastien Bruneau, Pavel Bulkin, Erik V. Johnson, Pere Roca I Cabarrocas. Understanding the amorphous-to-microcrystalline silicon transition in SiF4/H2/Ar gas mixtures. Journal of Chemical Physics, American Institute of Physics, 2014, 140 (23), ⟨10.1063/1.4883503⟩. ⟨hal-01230708⟩
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