Impact of charged species transport coefficients on self-bias voltage in an electrically asymmetric RF discharge

Jean-Maxime Orlac'H (1) , Tatiana Novikova (1) , Vincent Giovangigli (2) , Erik Johnson (1) , Pere Roca (1)

1 LPICM - Laboratoire de physique des interfaces et des couches minces [Palaiseau]
2 CMAP - Centre de Mathématiques Appliquées - Ecole Polytechnique

In this paper, we propose an original approach for assessing the accuracy of ion transport coefficients in fluid models for moderate pressure capacitively-coupled plasma discharges. Temporally asymmetric " tailored voltage " excitation waveforms are used to scan a wide range of discharge conditions in a simple one-dimensional framework. Several classical expressions for electron and ion transport coefficients are compared, and their influence over the self-bias is studied using a fluid model. The self-bias is shown to be insensitive to the choice of electron transport coefficients, while very sensitive to variations of ion mobilities. Our results show that fluid models can be competitive with hybrid models, provided self-consistent ion transport models are used.

Domaines: Physique des plasmas [physics.plasm-ph]

Jean-Maxime Orlac'H, Tatiana Novikova, Vincent Giovangigli, Erik Johnson, Pere Roca. Impact of charged species transport coefficients on self-bias voltage in an electrically asymmetric RF discharge. 2018. ⟨hal-01856184v1⟩