Inverse Analysis of Multiple Indentation Unloading Curves for Thin Film Young's Modulus Evaluation - Archive ouverte HAL Access content directly
Journal Articles Theoretical and Applied Mechanics Year : 2012

Inverse Analysis of Multiple Indentation Unloading Curves for Thin Film Young's Modulus Evaluation

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Abstract

The Oliver and Pharr method is the prevailing process for thin films Young's modulus evaluation. Introduced initially for homogeneous materials, this method does not account for the substrate and can consequently lead to significant error, especially at large indentation depths. We suggest here possible methods to improve the accuracy by making use of inverse analysis and finite element computations of the one layer elastic indentation problem.
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Dates and versions

hal-00723719 , version 1 (14-08-2012)

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Attribution - CC BY 4.0

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Joris Prou, Kikuo Kishimoto, Kazuaki Inaba, Andrei Constantinescu. Inverse Analysis of Multiple Indentation Unloading Curves for Thin Film Young's Modulus Evaluation. Theoretical and Applied Mechanics, 2012, 60, pp.249-261. ⟨10.11345/nctam.60.249⟩. ⟨hal-00723719⟩
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