Pere Roca I Cabarrocas, Romain Cariou, Martin Labrune. Low temperature plasma deposition of silicon thin films: From amorphous to crystalline.
Journal of Non-Crystalline Solids, Elsevier, 2012, 358 (17), pp.2000-2003.
⟨10.1016/j.jnoncrysol.2011.12.113⟩.
⟨hal-00806450⟩