Evolution in morphological, optical, and electronic properties of ZnO:Al thin films undergoing a laser annealing and etching process

C. Charpentier; R. Boukhicha; P. Prod׳homme; T. Emeraud; J.-F. Lerat; P. Roca I Cabarrocas; E.V. Johnson

doi:10.1016/j.solmat.2014.02.027

Journal articles

Evolution in morphological, optical, and electronic properties of ZnO:Al thin films undergoing a laser annealing and etching process

C. Charpentier R. Boukhicha ¹ P. Prod׳homme T. Emeraud J.-F. Lerat P. Roca I Cabarrocas ¹ E.V. Johnson ²

1 LPICM - Laboratoire de physique des interfaces et des couches minces [Palaiseau]

2 UL2 - Université Lumière - Lyon 2

Document type :

Journal articles

Domain :

Engineering Sciences [physics]

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https://hal-polytechnique.archives-ouvertes.fr/hal-01230703
Contributor : Pere Roca i Cabarrocas Connect in order to contact the contributor
Submitted on : Wednesday, November 18, 2015 - 7:47:08 PM
Last modification on : Monday, November 23, 2020 - 3:38:15 PM

Evolution in morphological, optical, and electronic properties of ZnO:Al thin films undergoing a laser annealing and etching process

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Evolution in morphological, optical, and electronic properties of ZnO:Al thin films undergoing a laser annealing and etching process

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