Evolution in morphological, optical, and electronic properties of ZnO:Al thin films undergoing a laser annealing and etching process

C. Charpentier; R. Boukhicha; P. Prod׳homme; T. Emeraud; J.-F. Lerat; P. Roca I Cabarrocas; E.V. Johnson

Evolution in morphological, optical, and electronic properties of ZnO:Al thin films undergoing a laser annealing and etching process

C. Charpentier ¹ R. Boukhicha ² P. Prod׳homme T. Emeraud J.-F. Lerat P. Roca I Cabarrocas ² E.V. Johnson ³

1 IF - Institut Fourier

2 LPICM - Laboratoire de physique des interfaces et des couches minces [Palaiseau]

3 UL2 - Université Lumière - Lyon 2

Document type :

Journal articles

Domain :

Engineering Sciences [physics]

Complete list of metadatas

https://hal-polytechnique.archives-ouvertes.fr/hal-01230703
Contributor : Pere Roca I Cabarrocas <>
Submitted on : Wednesday, November 18, 2015 - 7:47:08 PM
Last modification on : Wednesday, April 3, 2019 - 1:08:00 AM

Evolution in morphological, optical, and electronic properties of ZnO:Al thin films undergoing a laser annealing and etching process

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Evolution in morphological, optical, and electronic properties of ZnO:Al thin films undergoing a laser annealing and etching process

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